Coupling system for optical fibers and optical waveguides

ABSTRACT

An optical coupler may include a fiber optic structure that has a portion of an outer surface that is beveled at a predetermined angle relative to a longitudinal axis of the fiber optic structure. The beveled outer surface portion may be optically coupled with a waveguide core of an optical integrated circuit. The fiber optic structure may also include a second outer surface portion that is butt coupled to an end of an optical fiber to optically couple the second outer surface portion with the optical fiber.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. Non-Provisional applicationSer. No. 13/945,134, filed Jul. 18, 2013. The contents of U.S.Non-Provisional application Ser. No. 13/945,134 are hereby incorporatedby reference in their entirety.

TECHNICAL FIELD

The present disclosure relates generally to optical couplers, and moreparticularly to an angled fiber optic structure configured to opticallycouple an optical waveguide with an optical fiber.

BACKGROUND

Optical or light signals carrying information may be transmitted overoptical communication links, such as optical fibers or fiber opticcables. Optical integrated circuits may receive the optical signals andperform functions on the optical signals. Communicating the opticalsignals between the optical fibers and the optical integrated circuitswith a maximum amount of coupling efficiency is desirable. Alignmenttechniques, including active and passive alignment techniques, may beused to achieve maximum coupling efficiency. Active alignment may becostly because it involves active electronics and feedback loops.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a top view of a front end of an optical integratedcircuit and an end of an optical fiber.

FIG. 2 illustrates an axial cross-sectional view of an optical fiber.

FIG. 3 illustrates a cross-sectional side view of an example opticalcoupler.

FIG. 4 illustrates perspective view of the example optical coupler inFIG. 3.

FIG. 5 illustrates a cross-sectional axial view of the example opticalcoupler in FIG. 3.

FIG. 6. illustrates a second cross-sectional axial view of the exampleoptical coupler in FIG. 3.

FIG. 7A illustrates a third cross-sectional axial view of the exampleoptical coupler in FIG. 3.

FIG. 7B illustrates a fourth cross-sectional axial view of the exampleoptical coupler in FIG. 3.

FIG. 7C illustrates a fifth cross-sectional axial view of the exampleoptical coupler in FIG. 3.

FIG. 8 illustrates a sixth cross-sectional axial view of the exampleoptical coupler in FIG. 3.

FIG. 9 illustrates a side view of an optical coupler formed from anoptical fiber.

FIG. 10 illustrates a cross-sectional side view of an alternativeexample optical coupler.

FIG. 11 illustrates a cross-sectional axial view of the optical couplerin FIG. 10.

FIG. 12 illustrates a cross-sectional side view of a second alternativeexample optical coupler.

FIG. 13 illustrates a cross-sectional axial view of the optical couplerin FIG. 12.

FIG. 14 illustrates a cross-sectional side view of a third alternativeexample optical coupler.

FIG. 15 illustrates a cross-sectional axial view of the optical couplerin FIG. 14.

FIG. 16 illustrates a cross-sectional side view of a fourth alternativeexample optical coupler.

FIG. 17 illustrates a cross-sectional axial view of the optical couplerin FIG. 16.

FIG. 18 illustrates a cross-sectional side view of a fifth alternativeexample optical coupler.

FIG. 19 illustrates a cross-sectional axial view of the optical couplerin FIG. 18.

FIG. 20 illustrates a cross-sectional side view of a sixth alternativeexample optical coupler.

FIG. 21 illustrates a cross-sectional axial view of the optical couplerin FIG. 20.

FIG. 22 illustrates a cross-sectional side view of an example opticalsystem.

FIG. 23A illustrates a cross-sectional axial view of the example opticalsystem in FIG. 22, showing an example embodiment of a top layer ofoptical system.

FIG. 23B illustrates another cross-sectional axial view of the exampleoptical system in FIG. 22, showing an alternative example embodiment ofthe top layer.

FIG. 23C illustrates another cross-sectional axial view of the exampleoptical system in FIG. 22, showing a second alternative exampleembodiment of the top layer.

FIG. 23D illustrates another cross-sectional axial view of the exampleoptical system in FIG. 22, showing a third alternative exampleembodiment of the top layer.

FIG. 23E illustrates another cross-sectional axial view of the exampleoptical system in FIG. 22, showing a fourth alternative exampleembodiment of the top layer.

FIG. 23F illustrates another cross-sectional axial view of the exampleoptical system in FIG. 22, showing a fifth alternative exampleembodiment of the top layer.

FIG. 23G illustrates another cross-sectional axial view of the exampleoptical system in FIG. 22, showing a sixth alternative exampleembodiment of the top layer.

FIG. 24 illustrates an exploded view of the example optical system inFIG. 22.

FIG. 25 illustrates a cross-sectional axial view of the example opticalsystem, showing an optical fiber disposed in a support structure.

FIG. 26 illustrates a cross-sectional side view of an example opticalcoupler disposed in an example housing.

FIG. 27 illustrates a cross-sectional axial view of the optical couplerand housing in FIG. 26.

FIG. 28 illustrates another cross-sectional axial view of the opticalcoupler and housing in FIG. 26.

FIG. 29 illustrates a third cross-sectional axial view of the opticalcoupler and housing in FIG. 26.

FIG. 30 illustrates a cross-sectional side view of an example couplerdisposed in an alternative example housing.

FIG. 31 illustrates a cross-sectional axial view of the optical couplerand alternative housing in FIG. 30.

FIG. 32 illustrates another cross-sectional axial view of the opticalcoupler and alternative housing in FIG. 30.

FIG. 33 illustrates another cross-sectional axial view of the opticalcoupler and alternative housing in FIG. 30.

FIG. 34 illustrates an axial view of an alternative optical system thatincludes a plurality of optical couplers.

FIG. 35 illustrates an axial view of another alternative optical systemthat includes a plurality of optical couplers disposed in a housing.

FIG. 35A illustrates a top view of the optical system in FIG. 35,showing the optical system optically coupled to a multi-core opticalfiber.

FIG. 36 illustrates a flow diagram of an example method of manufacturingan optical coupler and optically coupling the optical coupler with anoptical integrated circuit and an optical fiber.

FIG. 37 illustrates a flow diagram of another example method ofmanufacturing an optical coupler.

DETAILED DESCRIPTION Overview

An apparatus includes an optical coupler that has a fiber opticstructure that comprises a core portion and a cladding portion. Thefiber optic structure also has an outer surface that includes a firstouter surface portion configured to optically couple the optical couplerwith an optical waveguide. The first outer surface portion is beveled ata predetermined angle relative to a longitudinal axis of the fiber opticstructure. The outer surface also includes a second outer surfaceportion configured to optically couple the optical coupler with anoptical fiber.

Another apparatus includes an optical coupler configured to opticallycouple a waveguide core of an optical integrated circuit with an opticalfiber. The optical coupler includes a fiber optic structure thatcomprises a core portion and a cladding portion. The core portionincludes a first end and a second end, where the core portion has aheight that increases from the first end to the second end according toa predetermined angle determined relative to a longitudinal axis of thefiber optic structure. In addition, the fiber optic structure has a flatouter surface portion that is beveled according to the predeterminedangle, where the beveled flat outer surface portion comprises both thecore portion and the cladding portion.

A system includes an optical waveguide structure of an opticalintegrated circuit. The optical waveguide structure includes a substrateand a waveguide core forming an optical waveguide path disposed on thesubstrate. The system also includes an optical coupler disposed over thewaveguide core. The optical coupler includes a fiber optic structurethat comprises a core portion and a cladding portion. An outer surfaceof the fiber optic structure includes a first outer surface portionbeveled at a predetermined angle relative to a longitudinal axis of thefiber optic structure, where the beveled first outer surface portion isa substantially flat surface that includes the core portion and thecladding portion. Also, the substantially flat beveled first surfaceportion faces the waveguide core to optically couple the optical couplerwith the waveguide core. The outer surface also includes a second outersurface portion that includes the core portion and the cladding portion.

A method includes affixing an optical fiber in a channel formed in aslab to form an integrated structure, where the optical fiber has a coreportion and a cladding portion. The method also includes removing afirst portion of the integrated structure from a second portion of theintegrated structure at a predetermined angle defined relative to alongitudinal axis of the fiber optic structure. The second portion hasan outer surface portion that is beveled at the predetermined angleafter removing the first portion from the second portion. In addition,the beveled outer surface portion includes both the core portion and thecladding portion.

Another method includes forming a channel in a slab, where the channelhas a depth that increases according to a predetermined angle from afirst end to a second end of the slab. The method also includes affixinga rounded outer surface of an optical fiber to inner walls of the slab,where the inner walls define the channel, and where a first portion ofthe optical fiber is disposed in the channel and a second portion of theoptical fiber is outside of the channel. Further, the method includesremoving at least some of the second portion of the optical fiber thatis outside of the channel to form a flat outer surface of the opticalfiber that is beveled at the predetermined angle, wherein the flat outersurface comprises a core and a cladding of the optical fiber.

Another method includes applying an adhesive material to a top layer ofan optical waveguide structure of an optical integrated circuit. Themethod also includes aligning a beveled outer surface portion of a fiberoptic structure with a nanotaper portion of the optical waveguidestructure, where the beveled outer surface is beveled at a predeterminedangle relative to a longitudinal axis of the fiber optic structure. Themethod also includes contacting the beveled outer surface of fiber opticstructure to the adhesive material to affix and optically couple thefiber optic structure to the optical waveguide structure.

Description of Example Embodiments

The present disclosure describes an optical coupler or couplingmechanism that is configured to optically couple one or more opticalwaveguides or waveguide paths with one or more optical fibers. Theoptical waveguides may be included with or as part of an opticalwaveguide structure, which may be located “on chip” or included as partof an optical integrated circuit (IC). The optical IC may be configuredto process or perform functions on optical signals, such as modulation,bending light, coupling, and/or switching, as examples. The opticalfibers may be optical components that are external to the optical IC.The optical fibers may be configured to communicate or carry the opticalsignals to and/or away from the optical IC. The optical coupler may beconfigured to optically couple the optical waveguide paths with theoptical fibers so that the optical signals may be communicated betweenthe optical IC and the optical fibers with optimum coupling efficiency(or minimum coupling loss).

FIG. 1 shows a top view of an example IC front end 102 of an optical IC104 and an example fiber end 106 of an optical fiber 108. The optical IC104 and the optical fiber 108 may be configured to communicate opticalsignals between each other through the IC front end 102 and the fiberend 106. The IC front end 102 may include an optical waveguide orwaveguide structure that may include an optical waveguide core 110disposed on a top planar surface 112 of a substrate 114. The waveguidestructure may also include an optical waveguide cladding (not shown inFIG. 1) that encases or surrounds the optical waveguide core 110. Theoptical waveguide core 110 may make up or form an optical waveguide paththrough which optical signals may propagate. FIG. 1 shows an exampleconfiguration of the IC front end 102 that includes a single waveguidecore 110 making up a single optical waveguide path. In alternativeexample configurations, multiple optical waveguide cores making upmultiple optical waveguide paths may be included in the IC front end102. The optical waveguide path may communicate optical signals to andfrom processing circuitry (not shown) of the optical IC that performsthe functions on the optical signals.

The optical waveguide core 110 may include a nanotaper 116 (alsoreferred to as taper or an inverse taper) to couple optical signalsreceived from the optical fiber 108 to the IC front end 102 and/or tocouple optical signals to be transmitted to the optical fiber 108 awayfrom the IC front end 102. The nanotaper 116 may have an associatedlength extending in the direction of propagation from a first end 118 toa second end 120. In addition, the nanotaper 116 may inversely taper orincrease in width from a first end 118 to a second end 120. The firstend 118 may be located at or near (e.g., a couple of microns away from)an edge 121 of the substrate 114 and/or the optical IC 104. At the firstend 118, the nanotaper 116 may have a width such that the optical modeat the first end 118 matches or substantially matches the mode of theoptical fiber 108 and hence supports an optical fiber mode of theoptical signals received from optical fiber 108. The second end 120 mayhave a width that supports a waveguide mode of the optical signals inthe optical waveguide structure. At the second end 120, optical signalsmay be confined or concentrated to the optical waveguide structure.

The nanotaper 116 may increase in width from the first end 118 to thesecond end 118 in various ways. In one example configuration of thenanotaper 116, as shown in FIG. 1, the width of the nanotaper 116 mayhave a linear profile in which the nanotaper 116 linearly increases inwidth from the first end 118 to the second end 120. In alternativeconfigurations, the width of the nanotaper 116 may increase inaccordance with other profiles, such as a non-linear profile (e.g., anexponential or higher-order polynomial profiles) as an example. Inaddition or alternatively, the nanotaper 116 may have different profilesfor its two opposing longitudinally extending sides. For example, oneside may linearly extend from the first end 118 to the second end 120,and the opposing side may non-linearly extend from the first end 118 tothe second end 120. Additionally, for some example configurations, thenanotaper 116 may be a single-segmented structure in which the width ofthe nanotaper 116 may continuously increase in accordance with a singleprofile from the first end 118 to the second end 120, as shown inFIG. 1. In alternative configurations, the nanotaper 116 may be amulti-segmented structure in which the width of the nanotaper 116 mayincrease differently in accordance with different profiles overdifferent segments of the multi-segmented nanotaper 116. Variousconfigurations or combinations of configurations for the nanotaper 116are possible.

Additionally, the nanotaper 116 may be an adiabatic optical waveguidestructure, in which minimal energy loss occurs as the optical signalspropagate over the adiabatic structure. To achieve or ensure minimalenergy loss, the length of the nanotaper 116 may be sufficient to causeor enable single modal propagation of the optical signals through thenanotaper 116 with minimal or no coupling of optical energy to otheroptical modes or radiation modes. The length of the nanotaper 116 may besignificantly greater than the wavelengths of the optical signals, andthe closer in effective index the modes are, the longer the length maybe. In some cases the length may be at least ten times greater than thewavelengths.

As shown in FIG. 1, the optical waveguide core 110 making up the opticalwaveguide path may also include a uniform waveguide portion 122connected to the second end 120 of the nanotaper 116. The uniformwaveguide portion 122 may have a substantially uniform width throughwhich optical signals may be confined to the optical waveguide path andmay be communicated between the nanotaper 116 and other portions of theoptical IC 104, such as processing circuitry (not shown).

The optical fiber 108 may include a fiber optic core 124 (denoted bydots), and a fiber optic cladding 126, which may surround the fiberoptic core 124. The fiber optic core 124 and cladding 126 may each bemade of an optical fiber material. Example fiber optic materials mayinclude glass or plastic, and the material used for the cladding 126 mayhave a lower index of refraction than the core 124, although other typesof fiber optic materials and/or index of refraction configurations foreither single or multimode operation, either currently existing or laterdeveloped, may be used.

As shown in FIG. 2, the optical fiber 108 may have a generally circularcross-sectional axial profile, which may be defined or determined by thecross-sectional axial shape of the fiber optic cladding 126. The fiberoptic core 124 may similarly have a circular cross-sectional axialshape. Each of the fiber optic core 124 and the fiber optic cladding 126may have an associated cross-sectional axial size, which may be definedor determined by their respective diameters.

The optical fiber 108 shown in FIGS. 1 and 2 may be single-core opticalfiber of various types. For example, the optical fiber 108 may be asingle-mode optical fiber that is configured to transmit optical signalsin a single fiber optic mode. Example diameters for a single-modeoptical fiber 108 may include a core diameter between 8 and 10.5micrometers (μm or microns), such as 9 μm, and a cladding diameter of125 μm, although optical fibers having other diameters may be used.Alternatively, the optical fiber 108 may include a multi-mode opticalfiber configured to transmit optical signals in multiple fiber opticmodes. In addition or alternatively, the optical fiber 108, either as asingle-mode or a multi-mode optical fiber, may be apolarization-maintaining optical fiber (PMF). Examples of currentlyexisting and commercially available optical fibers may include Corning®SMF28®, Corning® SMF28e®, Corning® SMF28e+®, Corning® ClearCurve®,Corning® ClearCurve® ZBL, or Fujikura PANDA polarization maintainingoptical fiber, as examples. Other types of single-core optical fibersmay be used. In alternative configurations, instead of being asingle-core optical fiber, the optical fiber 108 may be a multi-coreoptical fiber configured to be optically coupled with multiple waveguidepaths of the optical IC 104, as described in further detail below.

FIGS. 3-8 show various views of an example optical coupler 300 that maybe configured to optically couple an optical waveguide or waveguide pathof a front end of an optical IC and a fiber end of a single-core opticalfiber, such as the IC front end 102 of the optical IC 104 and the fiberend 106 of the optical fiber 108 shown in FIGS. 1 and 2. FIG. 3 shows across-sectional side view of the optical coupler 300 taken along acentral axis of the optical coupler. FIG. 4 shows a perspective view ofthe optical coupler 300 shown in FIG. 3 rotated 90 degrees. FIGS. 5-8are cross-sectional axial views of the optical coupler 300 taken alonglines 5-5, 6-6, 7A-7A, 7B-7B, 7C-7C, and 8-8, respectively.

The optical coupler 300 may include a fiber optic structure extending anoverall longitudinal length L₀ from a first end 331 to a second end 333.By being a fiber optic structure, the optical fiber 300 may include acore portion 330 and a cladding portion 332. The core and claddingportions 330, 332 may be made of optical fiber materials, such as glassor plastic, which may be the same or similar to the optical fibermaterials making up the core 124 and cladding 126 of the optical fiber108 shown in FIG. 1. The optical coupler 300, being a fiber opticstructure, may be formed from an optical fiber having a claddingdiameter d₀ and a core diameter d₁. The cladding diameter d₀ may be amaximum outer diameter of the cladding portion 332 over its axialcross-section, and the core diameter d₁ may be a maximum outer diameterof the core portion 330 for the optical coupler 300 over its axialcross-section.

The optical coupler 300 may include a beveled portion 335 having abeveled outer surface portion 334 of an outer surface of the opticalcoupler 300. The beveled outer surface portion 334 may be beveled at anangle Θ relative to a longitudinal axis of the optical coupler 300. Thebeveled surface portion 334 may include both the core portion 330 andthe cladding portion 332 of the fiber optic structure, as shown in FIGS.3 and 4. Over the beveled surface portion 334, the core and claddingportion 330, 332 may be flush or co-planar with each other so that thebeveled surface portion 334 is a substantially smooth or flat, planarsurface. In addition, the beveled surface portion 334 may be an exposedouter surface in that the beveled surface portion 334 may expose thecore portion 330 to outer surroundings of the optical coupler 300. Asshown in FIG. 4, each of the core and cladding portions 330, 332 overthe exposed beveled surface portion 334 may have an elliptical shape.The maximum lengths or transverse diameters of the core and claddingportions 330, 332 as determined over the major semi-axis of theelliptically shaped exposed beveled surface portion 334 may bedetermined by the core and cladding diameters d₁, d₀ and the angle Θ.The maximum widths or conjugate diameters of the core and claddingportions 330, 332 as determined over the minor semi-axis of theelliptically shaped exposed beveled surface portion 334 may be equal orsubstantially equal to the core and cladding diameters d₁ and d₀.

The outer surface of the optical coupler 300 may also include a secondexposed surface portion 337 that includes both the core portion 330 andthe cladding portion 332. Similar to the beveled exposed surface portion334, the second exposed surface portion 337 may expose the core portion330 to outer surroundings of the optical coupler 300. Also, over thesecond exposed surface portion 337, the core and cladding portions 330,332 may be flush or co-planar with each other so that the second exposedsurface portion 337 is a substantially smooth or flat, planar surface.As shown in FIG. 5, each of the core and cladding portions 330, 332 overthe second exposed surface portion 337 may be circularly shaped and havediameters that are equal or substantially equal to the core and claddingdiameters d₁ and d₀, respectively.

The outer surface of the optical coupler 300 may further include a thirdsurface portion 336, which may be an unexposed surface portion. Theunexposed surface portion 336 may only include the cladding portion 332and/or may not include the core portion 330. That is, over the unexposedsurface portion 336, the cladding portion 332 may cover the core portion330 or prevent the core portion 330 from being exposed to the outersurroundings of the optical coupler 300. Additionally, the unexposedsurface portion 336 of the outer surface may have a shape, such as arounded shape, that conforms to or tracks an outer surface of a claddingof an optical fiber.

As shown in FIG. 3, the beveled portion 335 of the optical coupler 300may longitudinally extend a first length L₁ from the first end 331 to asecond end 339. The beveled surface portion 334 may extend a secondlength L₂ from the first end 331 to the second end 339. The secondlength L₂ may be the maximum length or transverse diameter of theelliptically shaped beveled surface portion 334 shown in FIG. 4. Boththe first length L₁ and the second length L₂ may depend on and/or bedetermined from the angle Θ and the cladding diameter d₀. In particular,the second length L₂ of the beveled surface portion 334 may be equaland/or proportional to the ratio of the cladding diameter d₀ to the sineof the angle Θ (sin(Θ)). As such, the second length L₂ may vary as theangle Θ varies. As the angle Θ increases (i.e., moves toward 90degrees), the second length L₂ decreases. Conversely, as the angle Θdecreases (i.e., moves toward 0 degrees), the second length L₂increases. The longitudinal first length L₁ over the beveled portion 335may depend on and be directly proportional to the second length L₂, andso may similarly vary with the second length L₂ as the angle Θ varies.

Over the longitudinal first length L₁, an axial cross-sectionperpendicular to the longitudinal axis may change in height,cross-sectional shape, and compositional makeup of the core and claddingportions 330, 332. Over each axial cross-section, the height may bedetermined or defined by a maximum distance between the beveled surfaceportion 334 and the unexposed surface portion 336 that extendsperpendicular to the exposed surface portion 336. The height may varylinearly proportional to the angle Θ. At the first end 331, the heightmay be at a minimum, where the beveled surface portion 334 and theunexposed surface portion 336 may converge to a point. At the second end339, the height may be at a maximum, where the height may be equal tothe cladding diameter d₀.

Also, over the longitudinal length L₁, the axial cross-sections maychange cross-sectional shape from the first end 331 to the second end339. At the first end 331, the beveled exposed surface portion 334 andthe unexposed surface portion 336 may converge to a point, as previouslydescribed. At the second end 339, the axial cross section may becompletely circular, as shown in FIG. 8. In between the first and secondends 331 and 339, the beveled exposed surface portion 334 and theunexposed surface portion 336 may combine to form an outer surface ofthe optical coupler 300 having an axial cross section that issemi-circular, as shown in FIGS. 6 and 7A-7C.

In addition, the composition of the core and cladding portions 330, 332making up the semi-circular cross-sections may vary over thelongitudinal length L₀. For example, some axial cross-sections mayinclude only the cladding portion 332, as exemplified in the axialcross-section shown in FIG. 6. Other axial cross-sections may includeboth the core portion 330 and the cladding portion 332, as exemplifiedin the axial cross-section shown in FIG. 7A-7C.

The beveled portion 335 may longitudinally extend a third length L₃ overwhich the core portion 330 is part of the beveled surface portion 334,from a first end 341 to a second end 343. The core portion 330 mayextend a fourth length L₄ over the beveled surface portion 334, from thefirst end 341 to the second end 343. Both the third length L₃ and thefourth length L₄ may depend on and/or be determined from the angle Θ andthe core diameter d₁. In particular, the fourth length L₄ may be equaland/or proportional to the ratio of the core diameter d₁ to the sine ofthe angle Θ (sin(Θ)). As such, the fourth length L₄ may vary as theangle Θ varies. As the angle Θ increases (i.e., moves toward 90degrees), the fourth length L₄ decreases. Conversely, as the angle Θdecreases (i.e., moves toward 0 degrees), the fourth length L₄increases. The longitudinal third length L₃ depends on and is directlyproportional to the fourth length L₄, and so may similarly vary with thefourth length L₄ as the angle Θ varies.

As shown in FIGS. 7A-7C, the core portion 330 may vary in across-sectional height and shape over the third length L₃. Like theoverall height of the optical coupler 300, the cross-sectional height ofthe core portion 330 may linearly vary in accordance with the angle Θ.In addition, over the third length L₃, the core portion 330 may have across-sectional shape that transitions from a point at the first end 341(FIG. 7A), to being semi-circular in between the first end 341 to thesecond end 343 (FIG. 7B), to being fully circular at the second end 343(FIG. 7C). Is this way, over the third and fourth lengths L₃, L₄, thecore portion 330 may form a semi-conical structure.

The optical coupler 300 may further include a uniform portion 338connected to and/or formed integral to the beveled portion 335. Theuniform portion 338 may have a uniform axial cross-section over alongitudinal length L₅, from the second end 333 of the optical coupler300 to the second end 339 of the beveled surface portion 334, where theuniform portion 338 is connected to the beveled portion 335. FIGS. 5 and8 show the axial cross section of the optical coupler 300 being uniformover the longitudinal length L₅.

As previously described, the optical coupler 300 may be formed fromand/or be a part of an optical fiber. To illustrate, FIG. 9 shows across-sectional side view of a fiber end 900 of an optical fiber. Dottedline 902 in FIG. 9 divides the end 900 into a first portion 904 and asecond portion 906. The first portion 904 is shown using solid lines todenote the portion of the optical fiber used for the optical coupler 300shown in FIGS. 3-8. The second portion 906 is shown using dotted linesto denote a remaining, unwanted portion that may not be used for theoptical coupler 300. The angle Θ described above with reference to FIGS.3-8 may be an angle that is formed relative to a longitudinal axis ofthe optical fiber end 900. As shown in FIG. 9, the dotted line 902dividing the first and second portions 904, 906 may extend through coreand cladding portions 908, 910 of the optical fiber from a first end 912to a second opposing end 914 at the angle Θ relative to the longitudinalaxis of the optical fiber end 900. An example process of making theoptical coupler, including removal of the second unwanted portion 906from the first portion 904 used for the optical coupler is described infurther detail below.

After the second, unwanted portion 906 is removed from the first portion904, the optical coupler 300 having the three outer surface portions334, 336, and 337 shown in FIG. 3 may result. Further portions of theoptical coupler 300 may be removed to form various alternativeembodiments of the optical coupler 300. In particular, portionsbeginning from the first end 331 and/or the second end 333 of theoptical coupler 300 may be removed, which may reduce an overall size ofthe optical coupler 300, including a reduction in the overall length L₀of the optical coupler 300 and/or the first through fifth lengths L₁ toL₅ associated with the beveled portion 335 and the beveled surfaceportion 334; modify shapes, sizes and core and cladding compositionalmakeup of the beveled surface portion 334 and/or second exposed surfaceportion 337; modify orientations of the beveled surface portion 334 andthe second exposed surface portion 337 relative to each other; and/orform additional outer surface portions. Other modifications to theoptical coupler 300 may result when the further portions of the opticalcoupler are removed.

Looking at FIG. 3 in particular, to remove a first further portion ofthe optical coupler 300 beginning from the first end 331, a first pointor position along the beveled surface portion 334 from the first end 331may be determined. The first position may be within a range of possiblepositions that extends along the beveled surface portion 334 between thefirst end 331 of the optical coupler 300 and the second end 343 of thecore portion of 330. After the first position in the range isdetermined, the first further portion to be removed may be defined by afirst line segment extending from the first end 331 to the firstposition along the beveled surface portion 334, and by a second linesegment extending from the first position on the beveled surface portion334 to a second point or position on the unexposed surface portion 336.The first further portion of the optical coupler 300 defined by thefirst and second line segment may then be removed, which may form afourth outer surface portion adjacent to the beveled surface portion 334and the unexposed surface portion 336. In some example configurations,the second line segment may extend perpendicular to the beveled surfaceportion 334, so that the fourth outer surface portion, in turn, may beoriented perpendicular to the beveled surface portion 334.

Although the range in which the first position is determined extends tothe second end 343 of the core portion 330, the first position ispreferably determined so that at least some amount, if not all, of thecore portion 330 along the fourth length L₄ remains after the firstfurther portion is removed. In some configurations, that amount may bedetermined so that the optical coupler forms an adiabatic system withthe optical waveguide to which it is coupled, as described in furtherdetail below. Also, depending on where the first position along thebeveled surface portion is determined, the fourth outer surface portionmay include only the cladding portion 332 or alternatively, may includea combination of the core and cladding portions 330, 332. For example,if the first position is determined in between the first end 331 of theoptical coupler 300 and the first end 341 where the core portion 330begins, then the fourth surface portion may include only the claddingportion 332. Alternatively, if the first position is determined at thefirst end 341, then the fourth surface portion may include substantiallyall of the cladding portion 332, with a relatively small or negligibleamount of the core portion 330. Alternatively, if the first position isdetermined in between the first and second ends 341, 343 of the coreportion 330, then the fourth surface portion may include both core andcladding portions 330, 332. Also, for these alternative configurations,the core portion 330 at the fourth surface portion may have asemi-circular cross-sectional shape.

In addition or alternatively, a second further portion may be removedfrom the optical coupler 300 beginning from the second end 333. Thesecond further portion of the optical coupler 300 that may be removedmay include all or some of the uniform portion 338. In addition oralternatively, a third point or position along the beveled surfaceportion 334 may be determined to remove all or some of the secondfurther portion. The third position may be within a range of possiblepositions that extends along the beveled surface portion 334 between thesecond end 339 of the beveled surface portion and the second end 343 ofthe core portion of 330 that is part of the beveled surface portion 334.After the third position in the range is determined, the second furtherportion to be removed may be defined by a third line segment extendingfrom the second end 339 to the third position along the beveled surfaceportion 334, and by a fourth line segment extending from the thirdposition on the beveled surface portion 334 to a fourth point orposition on the unexposed surface portion 336. The second furtherportion of the optical coupler 300 defined by the third and fourth linesegments may then be removed. When the second further portion isremoved, the orientation of the second exposed surface portion 337 maybe changed such that the second exposed surface portion 337 is adjacentto the beveled surface portion 334 at the third position along thebeveled surface portion 334. In some example configurations, the fourthline segment may extend perpendicular to the beveled surface portion334, so that the orientation of the second exposed surface portion 337is oriented perpendicular to the beveled surface portion 334.

The axial cross-sectional shape and the compositional makeup of the coreand cladding portions 330, 332 at the second exposed surface portion 337may vary; depending on how much of the second further portion isremoved. For example, if only the uniform portion 338 of the opticalfiber 300 is removed, the axial cross-section of the optical coupler 300may be fully rounded, such as completely circular, as shown in FIG. 8.Alternatively, if more of the second further portion than the uniformportion 338 is to be removed and the third position along the beveledsurface portion 334 is determined, then the axial cross-section of theoptical coupler 300 over the second exposed surface portion 337 may bepartially rounded or semi-circular, as a part of the axialcross-sectional shape will include the flat, planar surface of thebeveled surface portion 334. Also, as the distance along the beveledsurface portion 334 between the second end 339 and the third positionincreases, the amount of the cladding portion 332 surrounding the coreportion 330, including the amount of the cladding portion 332 separatingcore portion 330 from the beveled surface portion 334, may decrease. Forexample configurations where the third position is determined at thesecond end 343 of the core portion 330, there may be no separationbetween the core portion 330 and the beveled surface portion 334, andthe core portion 330 may be substantially tangential with and form partof the beveled surface portion 334 at the second exposed surface portion337, as shown in FIG. 7C.

FIGS. 10-21 show cross-sectional side views taken along a central axisand corresponding cross-sectional axial views of various examplealternative configurations of the optical coupler 300 when variousamounts of a first further portion and/or a second further portion areremoved from the optical coupler 300. FIGS. 10-15 show alternativeexample optical couplers when different amounts of a second furtherportion, beginning from the second end 333, are removed. FIGS. 16-21show alternative example optical couplers when different amounts of afirst further portion, beginning from the first end 331, are removed. Inall of these alternative embodiments, the core and cladding portionsremain angled fiber optic structures at the angle Θ.

The alternative example optical coupler 1000 shown in FIGS. 10 and 11may be formed from the optical coupler 300 when a part of the uniformportion 338 may be removed, which may modify the second exposed surfaceportion 337 to form an alternative second exposed surface portion 1037.The second exposed surface portion 1037 may be adjacent and orientedperpendicular to a beveled surface portion 1034, which may be beveled atthe angle Θ. Also, an axial cross-sectional shape of the optical coupler1000 at the second exposed portion 1037 may be completely round, such aselliptical or circular, as shown in FIG. 11. In addition, for theexample optical coupler 1000, at the first end 1031, the beveled surfaceportion 1034 and an unexposed surface portion 1036 may converge to apoint.

The alternative example optical coupler 1200 shown in FIGS. 12 and 13may be similar to the alternative optical coupler 1000, except thatadditional material may be removed from the optical coupler 1000. Inparticular, in view of FIGS. 10 and 12, a position 1239 along thebeveled surface portion 1034 may be determined, and a correspondingportion may be removed from the optical coupler 1000 to form a secondexposed surface portion 1237 and a beveled surface portion 1234 of theoptical coupler 1200 shown in FIGS. 12 and 13. Also, the optical coupler1200 at the second exposed surface portion 1237 may have a semi-circularaxial cross-section, as shown in FIG. 13, as the flat, planar surface ofthe beveled surface portion 1234 may be part of the axial cross-section.Additionally, as shown in FIG. 10, the position 1239 along the beveledsurface portion 1034 may be in between the second end 1039 of thebeveled surface portion 1034 and a position 1439, which may correspondto the second end 343 of the core portion 330 shown in FIG. 3. As aresult, the cladding portion 1232 may separate the core portion 1230from the beveled surface portion 1234 over the axial cross-section atthe second exposed surface portion 1237, as shown in FIG. 13.

The alternative example optical coupler 1400 shown in FIGS. 14 and 15may be similar to the alternative optical couplers 1000 and 1200, exceptthat instead of the position 1239 being determined to form the opticalcoupler 1200, an alternative position 1439 may be determined along thebeveled surface portion 1034 to form a second exposed surface portion1437 and a beveled surface 1434 of the alternative example coupler 1400.As previously described, the alternative position 1439 may correspond tothe second end 343 of the core portion 330 shown in FIG. 3. As a result,a fully-rounded, such as fully circular or a fully elliptical, coreportion 1430 over the second exposed surface portion 1437 may betangential or substantially tangential to the beveled surface portion1434, as shown in FIG. 15.

FIGS. 16-21 show other alternative example optical couplers 1600, 1800,2000 when different amounts of a portion of the optical coupler 300,beginning from the first end 331, are removed. The optical couplers1600, 1800, 2000 are configured to have second exposed surface portions1637, 1837, 2037 configured similarly to the second exposed surfaceportion 1437 of the optical coupler 1400 shown in FIGS. 14 and 15.However, other configurations for the second exposed surface portions1637, 1837, and/or 2037, such as those for the example optical couplers300, 1000, or 1200 may be alternatively used.

With reference to FIGS. 3 and 16, the alternative example opticalcoupler 1600 may be formed from a determined point or position 1642along the beveled surface portion 334 in between the first end 331 ofthe beveled surface portion 334 and the first end 341 of the coreportion 330 to form a beveled surface 1634 and a fourth surface portion1640 of an outer surface of the optical coupler 1600. The fourth surfaceportion 1640 may be adjacent to the beveled surface portion 1634 andoppose the exposed surface portion 1637, in which the optical coupler1600 may longitudinally extend from the fourth surface portion 1640 tothe second exposed surface portion 1637. Additionally, as shown in FIG.16, the fourth surface portion 1640 may be oriented perpendicular to thebeveled surface portion 1634, although other orientations are possible.As shown in FIG. 16, the fourth surface portion 1640 and the secondexposed surface portion 1637 may both be oriented perpendicular orsubstantially perpendicular to the beveled surface portion 1634, and assuch, may be oriented parallel or substantially parallel to each other.As shown in FIG. 17, an axial cross section of the optical coupler 1600at the fourth surface portion 1640 may be semi-circular. Also, becausethe position 1642 was in between the ends 331 and 341 of the opticalcoupler 300, the compositional makeup of the fourth surface portion 1640may include only a cladding portion 1632, as shown in FIG. 17.

With reference to FIGS. 3 and 18, the alternative example opticalcoupler 1800 may be formed from a determined point or position 1842along the beveled surface portion 334 at the first end 341 of the coreportion 330 to form a beveled surface portion 1834 and a fourth surfaceportion 1840. Because the determined position 1842 is at the first end341, the fourth surface portion 1840 may include mostly a claddingportion 1832, and a relatively small or negligible amount, of a coreportion 1830, as shown in FIG. 19.

With reference to FIGS. 3 and 20, the alternative example opticalcoupler 2000 may be formed from a determined point or position inbetween the first end 341 and the second end 343 of the core portion 330to form a beveled surface portion 2034 and a fourth surface portion2040. Because the determined position 2042 is in between the first end341 and the second end 343, the fourth surface portion 2040 may includeboth a core portion 2030 and a cladding portion 2032. In addition, asshown in FIG. 21, the core portion 2030 at the fourth surface portion2040 may have a partially rounded or semi-circular cross-section.

The various optical couplers shown in FIGS. 3-21 are non-limitingexamples of optical couplers that may be formed from a fiber opticstructure having a beveled surface at an angle Θ. Other opticalcouplers, including optical couplers having different combinations ofthe features shown in FIGS. 3-21, may be formed in accordance with theabove description.

A beveled exposed surface portion of an optical coupler, such as thoseshown in FIGS. 3-21, may be positioned and oriented relative to anoptical waveguide to optically couple the optical coupler with theoptical waveguide. In particular, the optical coupler may be positionedover the optical waveguide such that the beveled exposed surface portionfaces and is substantially parallel to the core of the opticalwaveguide. Additionally, the second exposed surface portion of theoptical coupler, such as those shown in FIGS. 3-21, may be used tooptically couple the optical coupler with a single-core optical fiber.In particular, the second exposed surface portion may face and be buttcoupled with an end of the optical fiber.

FIG. 22 shows a partial cross-sectional side view of an optical systemthat includes an optical coupler 2200 optically coupled with an opticalwaveguide of an IC front end 2202 of an optical IC 2204 and a fiber end2206 of an optical fiber 2208. The optical coupler 2200 shown in FIG. 22has the configuration of the example optical coupler 1800 shown in FIG.18, although other optical couplers configured in accordance with thoseshown and described above with reference to FIGS. 3-21 may be used.

The IC front end 2202 of the optical IC 2204 may be a generally planarstructure that includes one or more planar layers disposed and/ordeposited on top of one another. The planar layers may include a toplayer 2268 that includes at least a core of the optical waveguide withwhich the optical coupler 2200 may be optically coupled. The top layer2268 may be disposed on a top surface 2212 of the other or non-toplayers of the planar structure. The other or non-top layers may begenerally referred to as the substrate or substrate layers 2214.

The layers of the front end 2202 of the optical IC may be configured inaccordance with one of various material technologies or systems used foroptical waveguides and optical integrated circuits. In some exampleconfigurations, the layers may be configured in accordance with siliconon insulator (SOI), which may be formed using complementarymetal-oxide-semiconductor (CMOS) fabrication techniques or SOITEC SmartCut™ process.

In accordance with SOI, the layers of the IC front end 2202 may includea first, base layer 2260 and a second, buried oxide (BOX) layer 2262disposed on a top planar surface 2264 of the base layer 2260. The baselayer 2260 may be made of silicon (Si), and the BOX layer 2262 may bemade of an oxide material, such as silicon dioxide (SiO₂). For purposesof the present description, the base and BOX layers 2260, 2262 may bereferred to as the substrate layers 2214 when the IC front end 2202 isconfigured for SOI. The top layer 2268 may be disposed on a top surface2212 of the BOX layer 2262. The top layer 2268 may include the core ofthe optical waveguide, which in accordance with SOI, may be an etchedlayer of silicon that is disposed on the top surface 2212 of the BOXlayer 2262.

To integrate the optical coupler 2200 with the IC front end 2202, theoptical coupler 2200 may be positioned over the top layer 2268. Inparticular, a beveled surface portion 2234 of the optical coupler 2200may face and be disposed on a top surface 2266 of the top layer 2268.When the beveled surface portion 2234 is disposed on the top surface2266 as shown in FIG. 22, the optical coupler 22 may be opticallycoupled with the optical waveguide.

The core of the optical waveguide may be included as a sub-layer orportion of the top layer 2268. In addition to the core, the top layer2268 may include an adhesive sub-layer or portion and/or a claddingsub-layer or portion. The adhesive portion may be used to affix theoptical coupler 2200 to the IC front end 2202. The adhesive portion mayinclude an epoxy, such as an optically transparent epoxy, or other typeof adhesive material. The cladding portion may be an additionalcomponent of the optical waveguide structure that at least partiallysurrounds or encases the core to confine optical signals to the core asthey propagate along the waveguide path.

FIGS. 23A-23G show cross-sections of the optical system of FIG. 22 alongthe line 23-23, illustrating various example configurations of the toplayer 2268. All of the configurations include a core 2310 of the toplayer 2268 disposed on the top surface 2212 of the BOX layer 2262. FIGS.23A-23G illustrate various ways in which adhesive and/or claddingportions may be integrated with the core to form an optical waveguideand affix the optical coupler 2200 to the top layer 2268.

In one example configuration of the top layer 2268 shown in FIG. 23A, atop layer 2268A may include an adhesive portion 2370A that is disposedaround longitudinally extending sides 2372, 2374 and a top surface 2376of the core 2310. The beveled surface portion 2234 may be disposed onand be in contact with a top surface 2366A, which may include only theadhesive portion 2370A. Additionally, as shown in FIG. 23A, the adhesiveportion 2370A may separate a core portion 2230 of the optical coupler2200 and the top surface 2376 of the core 2310.

In another example configuration of the top layer 2268 shown in FIG.23B, a top layer 2268B may include an adhesive portion 2370B that isdisposed around or adjacent to the sides 2372, 2374 but not the topsurface 2376 of the core 2310. In this way, the top surface 2366B mayinclude both the core and adhesive portion. When the optical coupler2200 is disposed on the top layer 2268B, the core portion 2230 may be indirect contact with the top surface 2376 of the core 2310, and theadhesive portion 2370B on both sides 2372, 2374 of the core 2310 mayaffix the optical coupler 2200 to the top layer 2268B.

In another example configuration of the top layer 2268 shown in FIG.23C, an adhesive portion 2370C of a top layer 2268C may be adjacent tothe sides 2372, 2374, and may also extend into and/or at least onetrench, such as a pair of trenches 2378C, 2380C that may be formed inthe BOX layer 2262. The trenches 2378C, 2380C may be formed in the BOXlayer 2262 and filled or added with adhesive material to provide anextra thickness or increased bond line for the adhesive portion, whichin turn may enhance the adhesive bond between the top layer 2268C andthe optical coupler 2200. The trenches 2378C, 2380C may longitudinallyextend parallel or substantially parallel with the sides 2372, 2374 ofthe core 2310 over at least a part of the length of the top layer 2268Cover which the optical coupler 2200 may be disposed. Also, FIG. 23Cshows the trenches 2378C, 2380C extending partially through the BOXlayer 2262. In alternative configurations, the trenches 2378C, 2380C mayextend completely through the BOX layer 2262 and/or into the base layer2260. Additionally, the trenches 2378C, 2380C may be formed using planarlithography and etching techniques. One example etching technique usedto form the trenches 2378C, 2380C may be deep reactive ion etching(DRIE), although other etching techniques may be used.

In another example configuration of the top layer 2268 shown in FIG.23D, a top layer 2268D may include a cladding 2382D surrounding and/oradjacent to the sides 2372, 2374 and the top surface 2376 of the core2310. An adhesive portion 2370D may be applied to a top surface 2384D ofthe cladding 2382D. In this way, the adhesive portion 2370D may beincluded as a top sub-layer of the top layer 2268D. The beveled surfaceportion 2234 may be disposed on the adhesive portion 2370D to be affixedto the IC front end 2202. For the example configuration shown in FIG.23D, the core 2310 may be separated from the core portion 2230 of theoptical coupler 2200 by both the adhesive layer 2370D and the cladding2382D of the top layer 2268D.

In another example configuration of the top layer 2268 shown in FIG.23E, a cladding 2382E of a top layer 2268E may be disposed around and/orbe adjacent the sides 2372, 2374 of the core, and a top surface 2384E ofthe cladding 2382E may be co-planar or substantially co-planar with thetop surface 2376 of the core 2310. Similar to the configuration shown inFIG. 23D, an adhesive portion 2370E may be included as a top sub-layerof the top layer 2268E and disposed over the top surfaces 2376, 2384E ofthe core 2310 and cladding 2382E, respectively. The beveled exposedsurface portion 2234 may be disposed on 2370E to be affixed to the ICfront end 2202.

In another example configuration of the top layer 2268 shown in FIG.23F, a top layer 2268F may include trenches 2378F and 2380F that may beformed in a cladding 2382F and extend into the BOX layer 2262. Thetrenches 2378F, 2380F may be filled with adhesive 2370F to affix thebeveled surface portion 2234 of the optical coupler 2200 to a IC frontend 2202. As shown in FIG. 23F, the trenches 2378F, 2380F may extendcompletely through the cladding 2382F, from the top surface 2384F of thecladding and partially through the BOX layer 2262. In alternativeexample configuration, the trenches 2378F, 2380F may extend onlypartially through the cladding 2382F. Alternatively, the trenches 2378F,2380F may extend completely through both the cladding 2382F and the BOXlayer 2262 and/or into the base layer 2260. The trenches 2378F, 2380Fmay be formed using planar lithography and etching techniques, such asDRIE, as previously mentioned. In addition or alternatively, one or morecutting techniques may be used to cut through the cladding 2382 to format least the portions of the trenches 2378F, 2380F that extend throughthe cladding 2382F. Additionally, the top layer 2268F is shown toinclude trenches 2378F, 2380F for a core/cladding configuration wherethe cladding 2382F surrounds the sides 2372, 2374 and the top surface2376 of the core 2310. In this way, the top surface 2366F of the toplayer 2268F, may include both the top layer 2384F and an adhesiveportion 2370F filled in the trenches 2378F, 2380F.

In another example configuration of the top layer 2268 shown in FIG.23G, trenches 2378G, 2380G filled with adhesive material may be used fora core/cladding configuration where a top surface 2384G of cladding2382G is co-planar with the top surface 2376 of the core 2310, and thecladding 2382G does not surround the top surface 2376 of the core 2310.For this example configuration, the top surface 2366G of the top layer2268G may include core, cladding, and adhesive portions that are flushor co-planar with each other. As shown in FIG. 23G, the core portion2230 of the optical coupler 2200 may be in direct contact with the core2310.

The example configurations of the top layer 2268F and 2268G are shownusing trenches instead of a top adhesive sub-layer to affix the opticalcoupler 2200 to the IC front end 2202. In alternative configurations,the trenches may be used in combination with a top adhesive sub-layer,such as the top adhesive sub-layers 2370D and 2370E used for theconfigurations shown in FIGS. 23D and E. The combination of the trenchesand the top adhesive sub-layer may be used for the core/claddingconfiguration where the cladding surrounds the top surface 2376 of thecore 2310 and/or for the core/cladding configuration where the topsurface of the cladding is co-planar with the top surface 2376 of thecore 2310

The cross-sections shown in FIGS. 23A-23G are non-limiting exampleconfigurations of a top layer 2368 for the IC front end 2202 thatincludes a core of an optical waveguide in combination with variousconfigurations of an adhesive portion used to affix the optical coupler2200 to the IC front end 2202 and an optional cladding portion. Otherconfigurations or combinations of the configurations of the top layer2368 shown in FIGS. 23A-230 may be possible.

Additionally, FIGS. 23A-23G show the core 2310 as a single-layerstructure. However, in alternative configurations, the core 2310 may bea multi-layer structure, such as a double-layer structure. For example,the core may be formed by a partial etching, instead of a completeetching, of a silicon layer disposed on the top surface 2212 of the BOXlayer 2262. A thinner layer of silicon formed from the partial etch mayremain disposed over the BOX layer 2262, which may be the first layer,and the core forming the waveguide path may be the second layer. Inanother alternative configuration, the core may include a ribbedstructure disposed on a base layer, which may be a nanotaper or uniformwaveguide portion determining the waveguide path. The ribbed and baselayers may be made of the same or different materials, such as siliconand polycrystalline (polysilicon) or silicon nitride (Si₃N₄), asexamples.

In addition, as shown in FIGS. 23A-23G, when the optical coupler 2200 ispositioned over the core 2310, the core portion 2230 of the opticalcoupler 2200 may be axially aligned with the core 2310.

Further, when positioned over the core 2310, the beveled surface portion2234, including the core portion 2230 of the beveled surface portion,may be longitudinally aligned with a nanotaper portion of the core 2310.FIG. 24 shows an exploded view of the optical system shown in FIG. 22,with the optical coupler 2200 and the IC front end 2202 rotated ninetydegrees, so that the surfaces of the optical coupler 2200 and the ICfront end 2202 that face each other (i.e., the beveled surface portion2234 and the top surface 2376 of the core 2310) are shown. The core 2310may include a nanotaper 2416 connected to uniform waveguide portion2422, which may be similar to the nanotaper 116 and uniform waveguideportion 122 shown in FIG. 1. The nanotaper 2416 may extend alongitudinal length and increase in width over the longitudinal lengthfrom a first end 2418 to a second end 2420.

In some example configurations, when the optical coupler 2200 ispositioned over the nanotaper 2416, the optical coupler 2200 and thenanotaper 2416 may form an adiabatic system or a combined adiabaticoptical structure. Some or all of the dimensions and/or materialproperties of the optical coupler 2200 and/or the core 2310, includingthe nanotaper 2416, may depend on each other or chosen relative to eachother. Further, the dimensions and/or properties may be determined inaccordance with optical criteria. For example, the width of thenanotaper 2416 at the larger-width end 2420, the shorter-width end 2418and the profile of the tapering between the two ends 2418, 2420 may bechosen such that an effective index of the mode at the larger-width end2420 of the nanotaper 2416 may be greater than the index of the coreportion 2230 at the first end 2231, such that the mode is predominantlyconfined in the nanotaper 2416 of the optical waveguide of the IC frontend 2202. Additionally, the width of the nanotaper 2416 at thesmaller-width end 2418 may be determined such that the effective indexof an overall mode of the nanotaper 2416 and the optical coupler 2200combined adiabatically decreases to a value that may be less than theindex of the core portion 2230, but greater than the index of thecladding portion 2232. In this way, the optical mode may bepredominantly confined in the core portion 2230 of the optical coupler2200 at the shorter-width end 2418 of the nanotaper 2416.

In accordance with the above optical criteria, the relative lengths ofthe optical coupler 2200 and the nanotaper 2416 may be determined. Insome example configurations, the lengths of the beveled surface portion2234 and the nanotaper 2416 may be the same or substantially the same,as shown in FIG. 24. In alternative example configurations, the lengthsmay be different. In some example configurations, the maximum length ortransverse diameter of the core portion 2230 of the beveled surfaceportion 2234 may be the same, different, and/or generally determinedrelative to length of the nanotaper 2416, regardless of the overalllength of the beveled surface portion 2234. This may be particularlyapplicable for configurations of the optical coupler 2200 where themaximum length or transverse diameter of the core portion 2230 over thebeveled surface portion 2234 may be different than the overall length ofthe beveled surface portion 2234, such as is shown in the variousconfigurations of the optical coupler in FIGS. 3-21.

As previously described, the length of the beveled surface portion 2234and/or the core portion 2230 of the beveled surface portion 2234, maydepend on and/or be inversely proportional to the angle Θ. As such, theangle Θ may be determined or selected to yield a desired length of thebeveled surface portion 2234 and/or the core portion 2230 of the beveledsurface portion 2234. Further, the angle Θ may be at least some minimumvalue greater than zero to provide a minimum amount of tapering of thecore portion 2230 that prevents a prohibitively long length for theoptical coupler 2200 to function as an adiabatic system with thenanotaper 2416 (e.g., the difference between a fundamental transverseelectric TE₀ mode signal and a first-order TE₁ mode signal is toosmall). For some example configurations, the angle Θ may be in a rangeof about 0.1 to 5 degrees, such as 0.2 degrees, although other degreeamounts or other ranges of degree amounts may be used to obtain adesired length of the beveled surface portion 2234 and/or the coreportion 2230 of the beveled surface portion relative to the length ofthe nanotaper 2416, while still achieving an adiabatic system with theoptical coupler 2200 and the nanotaper 2416.

In addition to the lengths of the optical coupler 2200 and the nanotaper2416 being determined relative to each other, the optical coupler 2200may be longitudinally aligned relative to the nanotaper 2416. Where theoverall length of the beveled surface portion 2234 is the same orsubstantially the same as the length of the nanotaper 2416, the firstend 2231 where the fourth surface portion 2240 is disposed may bealigned with the larger-width end 2420 of the nanotaper 2416, and thesecond end 2239 where the second exposed surface portion 2237 isdisposed may be aligned with the smaller-width end 2418 of the nanotaper2416. Alternatively, the longitudinal alignment between the nanotaper2416 and the optical coupler 2200 may be relative to the length of thecore portion 2230 over the beveled surface portion 2234. For example, afirst endpoint 2490 along the major axis of the elliptically shaped coreportion 2230 may be aligned with the larger-width end 2420 of thenanotaper 2416, and a second endpoint 2492 along the major axis may bealigned with the smaller-width end 2418.

In alternative configurations where the length of the beveled surfaceportion 2234 and/or the maximum length or transverse diameter of thecore portion 2230 is different than the length of the nanotaper 2416,longitudinal alignment may be relative to one of the ends 2418, 2420 ofthe nanotaper 2416, but not the other. For example, the second end 2239of the beveled surface portion and/or the second endpoint 2492 of thecore portion 2230 may be aligned with the shorter-width end 2418 of thenanotaper 2416. The first end 2231 and/or the first endpoint 2490 may bedisposed relative to the large-width end 2420 depending on therespective lengths of the beveled surface portion 2234 and the nanotaper2416. For example, if the beveled surface portion 2234 is longer thanthe nanotaper 2416, then the first end 2231 and/or the first endpoint2490 may extend beyond the larger-width end 2420 of the nanotaper 2416and be positioned over the uniform waveguide portion 2422.Alternatively, if the beveled surface portion 2234 is shorter than thenanotaper 2416, then the first end 2231 and/or the first endpoint 2490may be positioned over the nanotaper 2416 before the nanotaper 2416 isfinished inversely tapering. In still other alternative configurationswhere the lengths are different, longitudinal alignment may be relativeto the larger-width end 2420 instead of the shorter-width end 2418.

For some example manufacturing processes, the optical coupler 2200 maybe axially and/or longitudinally aligned with the nanotaper 2416passively by defining lithographically defined features on the opticalIC 2204. A vision based system may be used to place the optical coupler2200 over the IC front end 2202 aligned to the core 2310 relative tothese lithographically defined features.

Referring to FIGS. 22 and 24, the optical system may also include anoptical fiber support structure 2250 that is configured to receive thefiber end 2206 and position and support the fiber end 2206 in anoptimally aligned position so that a core portion 2224 of the fiber end2206 is in optimal axial alignment with the core portion 2230 of opticalcoupler 2200 at the second end 2239 to achieve optimum coupling betweenthe optical fiber 2208 and the optical coupler 2200.

As shown in FIG. 22, the fiber end 2206 may abut or be butt coupled tothe second end 2239 of the optical coupler 2200 to optically couple thefiber end 2206 with the second exposed surface portion 2237 of theoptical coupler 2200. When positioned in the support structure 2250, thefiber end 2206 may be butt coupled with the second end 2239 of theoptical coupler 2200 in an optimally aligned position relative to theoptical coupler 2200 to achieve optimum coupling between the two opticalstructures.

FIG. 25 shows a cross-sectional axial view of the optical system takenalong line 25-25. The support structure 2250 may include a channel 2502formed in a body 2504 of the support structure 2250. The channel 2502may be configured to receive, position, and support the fiber end 2206in the optimally aligned position. In the example configuration shown inFIG. 25, the channel 2502 may be a V-groove or V-groove type channel.The V-groove 2502 may be formed using planar lithography techniques andetching, such as potassium hydroxide (KOH) etching. That is, planarlithography techniques and etching may be used to form a channel to holdthe optical fiber 2208 to passively align the fiber end 2206 with theoptical coupler 2200 and the optical waveguide path to achieve optimumalignment and coupling.

A size of the V-groove 2502 may be determined by an angle φ, which maydepend on the material properties of the material making up the body2504. In some example configurations, the body 2504 may be made ofsilicon, and the angle φ may be about 70 degrees, which may depend onthe crystalline structure of the silicon. Other materials and or anglesof the V-groove 2502 are possible. Also, alternative exampleconfigurations may include different types of channels other thanV-grooves, such as U-shaped channels, rectangular shaped channels, ortrapezoidal shaped channels. These different types of channels or shapedchannels may depend on the material making up the body 2504 and/or thetype of process used to make the channel 2502. Various configurationsare possible.

Referring back to FIG. 22, for some example configurations, the supportstructure 2250 may be part of or integrated with the substrate 2214 ofthe optical IC 2204. For example, the support structure 2250 may be partof and made of the same material as a base layer 2260 of the substrate2214. In alternative example configurations, the support structure 2250may be a component of the optical system that is separate from and/orexternal to the substrate 2214, and that may be positioned adjacent toor near the substrate 2214 in the optical system. Various configurationsare possible.

In sum, when the core portion 2230 of the optical coupler 2200 ispositioned and aligned with core 2310 of the nanotaper 2416, and thefiber end 2206 of the optical fiber 2208 is positioned in the channel2502 (FIG. 25), the optical coupler 2200 may optically couple thewaveguide path formed by the core 2310 with the optical fiber 2208 withoptimum coupling efficiency. In this way, optical signals beingcommunicated between the optical IC 2204 and the optical fiber 2208 maytransition between the waveguide mode and optical fiber modes withminimum loss and/or maximum coupling efficiency.

The optical system shown in FIGS. 22-25 is not limited to including allof the optical coupler 2200, the optical IC 2204, and the optical fiber2208. Some configurations of the optical system may include the opticalIC 2204 and the optical coupler 2200, but may not include the opticalfiber 2208. Alternatively, the optical system may include the opticalcoupler 2200 and the optical IC 2204 without the support structure 2250,and the support structure 2250 may be considered a component that isseparate to the optical system. In still other example alternativeconfigurations, the optical system may include the IC front end 2202without other portions of the optical IC 2204. For example, the IC frontend 2202 may be a standalone component that is considered separate fromother optical IC portions. The standalone IC front end 2202 may beintegrated with the optical coupler 2200, and together, the IC front end2202 and the optical coupler 2200 may be used or implemented with one ormore optical integrated circuits. Various configurations or combinationsof configurations of the optical system are possible.

In addition, the optical system shown and described with reference toFIGS. 22-25 is described for optical ICs using SOI. The components andfeatures of the optical system may be equally or similarly applicable tooptical ICs that use material technologies other than SOI or that useother types of semiconductor materials, such as Germanium (Ge) orcompound semiconductor materials, such as Gallium Arsenide (GaAs),Aluminium Gallium Arsenide (Al_(x)Ga_(x)As), Indium Phosphide (InP),Indium Gallium Arsenide (In_(x)Ga_(1-x)As), Indium Gallium ArsenidePhosphide (In_(x)Ga_(1-x)As_(y)P_(1-y)), Indium Aluminum Arsenide(In_(x)Al_(1-x)As), Indium Aluminum Gallium Arsenide(In_(x)Al_(y)Ga_(1-x-y)As), Gallium Nitride (GaN), Aluminum GalliumNitride (Al_(x)Ga_(1-x)N), Aluminum Nitride (AlN), or Gallium Antimodide(GaSb), as examples. Alternatively, the substrate 2214 and the core 2310may be made of one or more polymers or polymer materials. Othermaterials or configurations of materials are possible.

For some example configurations, the optical coupler may be disposed orpositioned within a housing for manufacturability or support. FIGS.26-29 show various views of the optical coupler 2200 positioned in anexample housing 2600. In alternative embodiments, other example opticalcouplers, including those previously shown and described with referenceto FIGS. 3-25, may be similarly positioned within the example housing2600.

The housing 2600 may include a body 2602 and a channel 2604 extending inthe body 2602 from a first end 2606 to a second, opposing end 2608. Theoptical coupler 2200 may be positioned in the channel 2604. The channel2604 may have a height or depth that increases in accordance with theangle Θ. Dotted line 2618 is shown in FIG. 26 to indicate a planeparallel or substantially parallel with the beveled surface portion 2234to identify the angle Θ. When the optical coupler 2200 is positioned inthe channel 2604 of the housing 2600, a base surface 2614 of the body2602 may be coplanar or substantially coplanar with the beveled surfaceportion 2234 of the outer surface of the optical coupler 2200. Thecoplanar surfaces 2234, 2614 may be suitable for mounting and affixingthe optical coupler 2200 with the housing 2600 to a top layer of anoptical IC.

For the example housing 2600, the body 2602 may be made of a materialthat is the same or similar to the fiber optic materials used for thecore portion 2230 or the cladding portion 2232 of the optical coupler2200. An example material may be glass. When glass is the material usedfor the body 2602, a cutting procedure in which a cutting mechanism,such as a saw cutting into the body 2602, may be a suitable removalprocedure to remove material from the body to form the channel 2604. Inalternative configurations, an etching process may be used to remove theglass material from the body to form the channel 2604.

The cutting procedure, or the removal procedure generally, may determinethe cross-sectional shape for the channel 2601. As shown in FIGS. 27-29,the channel 2604 may have a generally rectangular cross-sectional shape,which may be defined or determined by inner walls 2610, 2612, and 2614.Cross-sectional shapes other than rectangular, such as U-shaped ortrapezoidal shapes, may be formed, depending on the cutting mechanismand/or the material used for the body 2602. For example, in alternativeexample embodiments, the body 2602 may be made of a material, such assilicon, in which etching and planar lithography techniques may be usedto form the channel 2604. For these alternative embodiments, the channel2604 may be a V-groove, similar to the V-groove 2502 shown in FIG. 25.

As shown in FIG. 26, the length of the housing 2600 from the first end2606 to the second end 2608 may be the same or substantially the same asthe length of the optical coupler 2200 from the first end 2231 to thesecond end 2239. Alternatively, the lengths may be different and in someexample configurations, the optical coupler 2200 may extend beyond theends 2606, 2608 of the housing 2600, depending on the process used tomanufacture the optical coupler 2200 and the housing 2600.

FIGS. 30-33 show various views of the optical coupler 2200 positioned inan alternative example housing 3000 that includes a body 3002 and achannel 3004 extending in the body 3002 from a first end 3006 to asecond end 3008. The alternative example housing 3000 may be made of amaterial in which etching and planar lithography techniques may be asuitable removal process to form the channel 3004, such as silicon.

In the example configuration shown in FIGS. 30-33, the channel 3004 maybe formed as a V-groove extending in the body 3002 of the housing 3000,which may be similar to the V-groove 2502 shown in FIG. 25. The V-groove3004 may be formed using etching and planar lithography techniques. TheV-groove channel 3004 may be defined or determined by inner walls 3010,3012 of the body 3002. The V-groove 3004 may also be defined ordetermined by an angle 8 formed by an intersection of the two innerwalls 3010, 3012, such as at a point or corner 3016, although othershaped intersections are possible depending on the etching andlithography techniques used. Also, the angle δ may depend on thematerial properties of the material making up the body 3002. In someexample configurations, the body 3002 may be made of silicon, and theangle δ may be about 70 degrees, which may depend on the crystallinestructure of the silicon, as previously described.

As shown in FIGS. 30-33, when the optical coupler 2200 is positioned inthe housing 3000, the base surface 3014 may be coplanar or substantiallycoplanar with the beveled surface portion 2234 of the outer surface ofthe optical coupler 2200. So that the beveled surface portion 2234 andthe base surface 3014 may be flush or coplanar, the V-groove channel3004 may have a height or depth that increases over a length of thehousing 3000 extending from the first end 3006 to a second end 3008. Theincreasing height may be proportional to the increasing height of theoptical coupler 2200 while the angle δ of the V-groove 3004 may remainconstant over the length.

As shown by the cross-sectional views in FIGS. 31-33, the height of theV-groove 3004 may be determined or defined as a distance extending froma point or position coplanar with the base surface 3014 to theintersection 3016 of the inner walls 3010, 3012. The height may increaseover the length of the housing 3000 in accordance with and/orproportional to the increasing height of the optical coupler 2200, whichmay depend on the angle Θ. Dotted line 3018 is shown in FIG. 30 toindicate a plane parallel or substantially parallel with the flatexposed surface portion 3014 to identify the angle Θ.

For some configurations, the example housing 2600 made of glass (i.e., amaterial that is the same or similar to the fiber optic materials usedfor optical coupler 2200) may be preferred over the example housing 3000made of silicon (i.e., a material different than the fiber opticmaterials used for the optical coupler 2200). In particular, when thematerials are the same or similar, an optical fiber may be integratedwith the housing before the optical coupler is formed from the opticalfiber. For example, the optical fiber may be positioned in a channel ofuniform height in the glass housing. Once the optical fiber and thehousing are integral components, any removal processes performed on theoptical fiber to form the optical coupler may similarly andsimultaneously be formed on the housing. As a result, the beveledsurface portion of the optical coupler and the base surface of the glasshousing may be more co-planar with each other. In contrast, when siliconis used, removal processes performed on an optical fiber to form theoptical coupler may not be used to remove silicon. Instead, a channel,such as a V-groove, with an angled depth at the angle Θ may be formed,and the optical fiber may be positioned in the angled V-groove. Aportion of the optical fiber may protrude or extend beyond the angledV-groove, and this portion may be removed to form the optical coupler.The resulting co-planar beveled surface portion and the base surface ofthe silicon housing may not be as co-planar or smooth as where a glasshousing is used.

FIGS. 26-33 show the optical coupler 2200 positioned in the examplehousings 2600, 3000 in isolation. However, the optical coupler 2200positioned in the housing 2600 or the housing 3000 may be used orimplemented together in an optical system, such as the optical systemshown in FIGS. 22-25. For example, the optical coupler 2200 positionedin the housing 2600 or the housing 3000 may be positioned over andaffixed to the top layer 2268, as previously described.

The above description with reference to FIGS. 3-33 describes an opticalcoupler that is configured to optically couple an optical fiber with asingle fiber optic core with a single waveguide path of an optical IC.Alternative optical systems may include a plurality or an array ofoptical waveguide paths that may communicate optical signals to aplurality or an array of optical fibers.

FIG. 34 shows a cross-sectional view of an example optical system thatincludes a plurality of waveguide paths 3410A, 3410B, 3410C disposed ona BOX layer 3412 of a substrate 3414. FIG. 34 shows three waveguidepaths 3410A-C, although any number of optical waveguide paths may beincluded. A plurality of optical couplers 3400A-3400C, which may beconfigured in accordance with the example optical couplers shown inFIGS. 3-21, may be used to optically couple the plurality of waveguidepaths 3410A-3410C with a plurality of optical fibers (not shown). Eachof the optical couplers 3400A-3400C may be disposed over and alignedwith one of the optical waveguide paths 3410A-3410C. In addition, asshown in FIG. 34, a support structure 3450 may include a plurality ofchannels 3402A-3402C to receive the plurality of optical fibers andpassively align the plurality of optical fibers with the plurality ofoptical couplers 3400A-3400C. The channels 3402A-3402C, which may beV-grooves as shown in FIG. 25, may be formed using planar lithographyand etching techniques, as previously described. The V-grooves3402A-3402C may be separated by a pitch, which may be defined and/orsupported by the etching and planar lithography techniques used to formthe V-grooves.

FIG. 35 shows a cross-sectional view of another example optical systemthat includes a plurality of optical couplers 3500A-3500C, which may beconfigured in accordance with the optical couplers shown in FIGS. 3-21.The optical system shown in FIG. 35 is similar to the optical systemshown in FIG. 34, and further includes a housing 3501 configured tohouse the plurality of optical couplers 3500A-3500C. The housing 3501may be configured and/or formed similarly to the example housing 2600shown in FIGS. 26-29, or the example housing 3000 shown in FIGS. 30-33.The housing 3501 includes a body 3502 and a plurality of channels3504A-3504C configured to house the plurality of optical couplers3500A-3500C. As shown in FIG. 35, the housing 3501 may include a singleintegrated body 3502. In alternative example configurations, the housing3501 may include a plurality of separate bodies, each configured withone or more channels to house one or more optical couplers. Variousconfigurations are possible.

The optical couplers 3400A-C, 3500A-C shown in FIGS. 34-35 may be usedto optically couple a plurality of optical waveguide paths of an opticalIC with a plurality of single core optical fibers. In other systems, theoptical couplers 3400A-C, 3500A-C may be used to optically couple aplurality of optical waveguide paths of an optical IC with a singleoptical fiber that includes multiple cores (i.e., a multi-core opticalfiber). Each of the optical couplers 3400A-C or 3500A-C may beconfigured to optically couple one core of the multi-core optical fiberwith one of the optical waveguide paths of the optical IC. Toillustrate, FIG. 35A shows a top view of the example optical systemshown in FIG. 35, and further shows a fiber end 3506 of a multi-coreoptical fiber 3508 positioned in a support structure 3550 and buttcoupled to the optical couplers 3500A-3500C (shown as dotted lines). Themulti-core optical fiber 3508 is shown as including three cores 3524A,3524B, and 3524C encased or embedded in a single cladding 3526. Each ofthe cores 3524A-3524C may be optically coupled to one of the opticalcouplers 3500A-3500C. In particular, as shown in FIG. 35A, the firstcore 3524A is optically coupled to the first optical coupler 3500A, thesecond core 3524B is optically coupled to the second optical coupler3500B, and the third core 3524C is optically coupled to the thirdoptical coupler 3500C.

The present description also describes example methods of manufacturingan optical coupler with a housing and optically coupling the opticalcoupler with an optical waveguide path and an optical fiber. FIG. 36shows a flow chart of an example method 3600 of manufacturing an opticalcoupler with a housing having a uniform depth channel. At block 3602, achannel with a uniform or substantially uniform depth may be formed in aslab to create the housing. The channel may be formed using variousprocesses, depending on the material used for the housing. Exampleprocesses may include cutting or etching. For example, where glass isused, the channel may be formed using a cutting process, in which a sawor other cutting mechanism may be used to cut into the glass slab toform the channel. Alternatively, etching techniques may be used. Asanother example, where silicon is used as the material for the housing,the channel may be formed through planar lithography and etchingtechniques. The channel may be formed to have a uniform depth betweenopposing ends of the formed channel. In some examples, the depth of thechannel may be the same or substantially the same as a size or diameterof an optical fiber used to make the optical coupler.

At block 3604, after the channel is formed in the slab, a portion, suchas an end, of an optical fiber may be positioned in the channel. Also,at block 3604, the portion of the optical fiber may be secured in thechannel by applying an adhesive material, such as an epoxy, which mayaffix the portion of the optical fiber positioned in the channel toinner walls of the slab defining the channel. When affixed to the innerwalls of the slab, the slab and the optical fiber may form a combined orintegrated structure.

At block 3606, one or more removal processes may be performed on theoptical fiber positioned in the channel to form the optical couplerpositioned in the housing. For example, a first removal process mayremove a first portion of the optical fiber and the slab from a secondportion of the optical fiber and the slab at a predetermined angle Θrelative to a longitudinal axis of the optical fiber. The second portionmay be used for the optical coupler. After the first removal process isperformed, an outer surface that includes a beveled exposed surfaceportion beveled at the angle Θ and a second exposed surface portion maybe formed. Both exposed portions may include core and cladding portionsof the optical fiber. One or more additional removal processes may beperformed to remove further additional portions from the second portionformed from the first removal process. The additional removal processesmay be performed to form an overall shape or size of the optical couplerand the housing. In particular, the additional removal processes maymodify or reduce a length of the beveled surface portion and/or modifyan orientation of the second exposed surface portion relative to thebeveled exposed surface portion.

Various techniques may be used to perform the removal processes,including polishing, cleaving (e.g., laser cleaving), slicing, grinding,or combinations thereof. For example, a relatively large amount of theslab and the optical fiber may be removed using cleaving techniques, anda remaining relatively small amount of the housing and the optical fiber(e.g., 4-5 μm) may be removed using polishing techniques. Othertechniques, currently known or later developed, may be used during theremoval processes. Also, where the housing is made of glass or othersimilar material as the materials of the optical fiber, the varioustechniques or processes used to remove portions of the optical fiber toform the optical coupler—such as cleaving, slicing, grinding, polishingetc.—may also be used to remove portions of the housing. In this way,any removal processes performed on the optical fiber may simultaneouslybe performed on the housing, which may yield a substantially uniform orsmooth overall surface between the beveled surface portion of theoptical coupler and a base surface portion of the housing.

Additional or further manufacturing processes may be performed tooptically couple the optical coupler and housing with a waveguide pathof an optical IC. For example, at block 3608, the optical coupler andthe housing may be positioned over and/or affixed to a front end of theoptical IC. In particular, the optical coupler may be positioned overand/or aligned with a nanotaper portion of an optical waveguide path ata front end of the optical waveguide path. For some examples, theoptical coupler may be axially and/or longitudinally aligned with thenanotaper passively by implementing lithographically defined features onthe optical IC. A vision based system may be used to place the opticalcoupler over the IC front end aligned to the nanotaper relative to theselithographically defined features.

Also, at block 3608 the optical coupler and housing may be affixed tothe optical IC. To affix the optical coupler to the optical IC, one ormore optically transparent adhesive portions may be applied to a toplayer of the optical IC. In some examples, the adhesive portion may be atop sub-layer that may be added or applied over a core of the opticalwaveguide. In addition or alternatively, the adhesive portion may beapplied by filling trenches extending longitudinally along sides of thecore. The trenches may be formed using various etching techniques, suchas KOH or DRIE as examples. After the trenches are formed, the trenchesmay be filled with the adhesive material.

Still further or additional processes may be performed to opticallycouple the optical coupler with a fiber end of an optical fiber. Forexample, at block 3610, a channel may be formed in a substrate orsupport structure portion of the optical IC. The channel may be formedusing various techniques such as planar lithography and etching. Thechannel may be aligned with an optical waveguide path of the optical IC.Also, at block 3610, after the channel is formed, the fiber end of theoptical fiber may be positioned in the channel. When positioned in thechannel, the fiber end may be butt coupled with the second exposedsurface portion of the optical coupler.

FIG. 37 shows a flow chart of another example method 3700 ofmanufacturing an optical coupler with a housing made of an etchablematerial, such as silicon. At block 3702, a channel may be formed in aslab to create the housing. The channel may be a V-groove trench that isformed using planar lithography and etching techniques. The V-groovetrench may be etched to have a height or depth that varies correspondingto a varying height of the optical coupler to be formed, which maydepend on the angle Θ. The height or depth of the V-groove trench may bevaried by increasing the width of a mask layer defining the V-groovetrench along its length during the lithography and/or etching processes.

At block 3704, after the channel is formed in the slab and the housingis created, a portion of an optical fiber may be inserted and positionedat a desired position in the V-groove. The optical fiber may bepositioned in the V-groove trench such that no core material (or anegligible amount) is in the V-groove at one end of the housing, andsuch that a full axial cross-section of the core material (such as acomplete circular cross-section) is in the V-groove at a second-opposingend of the housing. Also, at block 3704, once the optical fiber ispositioned in the desired position, an epoxy or other adhesive materialmay be applied within the V-groove around the optical fiber to affix theoptical fiber to the housing.

When the optical fiber is in the desired position, only a portion of theoptical fiber may be within or inside the V-groove, and a remainingportion may be located outside of the V-groove (and the housinggenerally). At block 3706, at least some of the remaining, outsideportion may be removed or detached from the portion of the optical fiberin the V-groove. The outside portion may be removed such that after theoutside portion is removed, the portion of optical fiber inside theV-groove trench has a flat and/or polished surface that includes boththe core and cladding portions of the optical fiber. The flat and/orpolished surface may be flush or substantially even with a base surfaceof the housing. Various techniques may be used to remove the outsideportion, including polishing, cleaving (e.g., laser cleaving), slicing,grinding, or combinations thereof. For example, a relatively largeamount of the outside portion may be removed using cleaving techniques,and a remaining relative small amount of the outside portion (e.g., 4-5μm) may be removed using polishing techniques. Other techniques,currently known or later developed, may be used during the removalprocess. After the removal process is performed at block 3706, anoptical coupler made of an angled optical fiber structure with a heightthat increases at a predetermined angle as the optical fiber structurelongitudinally extends in the housing and that has a flat, polishedsurface exposing the core of the optical fiber may be created.

After the flat surface is formed, other portions of the outside portionmay still remain. For some configurations, all of the remaining portionsmay be removed as well using all or some of the removal techniques orprocesses described above. For other configurations, at least some ofthe remaining portions may be kept attached to the optical fiber portionin the V-groove.

After the flat surface is formed and other portions of the outsideportion are optionally removed, further or additional acts may beperformed to optically couple the optical coupler positioned in thehousing with an optical waveguide path of an optical IC and a fiber endof an optical fiber, as described above.

The above-described methods 3600 and 3700 are described for making asingle optical coupler disposed in a single channel. Similar processingtechniques may be used to make a plurality of optical couplers disposedin a plurality of channels of a housing.

Various embodiments described herein can be used alone or in combinationwith one another. The foregoing detailed description has described onlya few of the many possible implementations of the present invention. Forthis reason, this detailed description is intended by way ofillustration, and not by way of limitation.

We claim:
 1. A method comprising: affixing an optical fiber in a channelformed in a slab to form an integrated structure, the optical fibercomprising a core portion and a cladding portion; removing a firstportion of the integrated structure from a second portion of theintegrated structure at a predetermined angle defined relative to alongitudinal axis of the fiber optic structure, wherein the secondportion has an outer surface portion that is beveled at thepredetermined angle after removing the first portion from the secondportion, and wherein the beveled outer surface portion comprises boththe core portion and the cladding portion; removing a third portion ofthe integrated structure from the second portion to form a second outersurface portion adjacent the beveled outer surface portion; and removinga fourth portion of the integrated structure from the second portion toform a third outer surface portion, wherein the third outer surfaceportion is adjacent to the beveled outer surface portion and opposes thesecond outer surface portion.
 2. The method of claim 1, wherein thechannel has a substantially uniform depth in the slab from a first endto a second end of the slab.
 3. The method of claim 2, wherein theuniform depth of the channel is about equal to a diameter of the opticalfiber.
 4. The method of claim 1, wherein the slab comprises a glassmaterial, and wherein the channel is formed through a cutting process.5. The method of claim 1, wherein the slab comprises silicon, andwherein the channel is formed through at least one of lithography or anetching process.
 6. The method of claim 1, wherein removing the firstportion from the second portion comprises performing at least one of: apolishing process, a cleaving process, a slicing process, or a grindingprocess on the integrated structure.
 7. The method of claim 1, furthercomprising: affixing the beveled outer surface portion to a top surfaceof a top layer of an optical integrated circuit, the top layercomprising a waveguide core that forms an optical waveguide path of theoptical integrated circuit.
 8. The method of claim 7, furthercomprising: aligning the core portion of the beveled outer surface witha nanotaper of the waveguide core before affixing the beveled outersurface to the top surface.
 9. The method of claim 7, furthercomprising: forming a pair of trenches in the top layer, each of thepair of trenches extending along a side of at least a portion of thewaveguide core; and adding an adhesive material in each of the pair oftrenches, wherein the beveled outer surface portion is affixed to theadhesive material in the trenches.
 10. The method of claim 9, whereinthe top layer further comprises a waveguide cladding surrounding thewaveguide core, and wherein forming the pair of trenches comprisesforming the pair of trenches in the waveguide cladding.
 11. The methodof claim 1, wherein the predetermined angle is in a range of about 0.1degrees to 5 degrees.
 12. A method comprising: applying an adhesivematerial to a top layer of an optical waveguide structure of an opticalintegrated circuit; aligning a beveled outer surface portion of a fiberoptic structure with a nanotaper portion of the optical waveguidestructure, the beveled outer surface beveled at a predetermined anglerelative to a longitudinal axis of the fiber optic structure; contactingthe beveled outer surface of fiber optic structure to the adhesivematerial to affix and optically couple the fiber optic structure to theoptical waveguide structure; and positioning a fiber end of an opticalfiber in a channel of a support structure of the optical integratedcircuit to butt couple the fiber end with a second outer surface portionof the fiber optic structure, the optical fiber being optically coupledto the fiber optic structure when positioned in the channel of thesupport structure.
 13. The method of claim 12, further comprising:performing at least one of an etching process or a planar lithographyprocess on the support structure to form the channel.
 14. The method ofclaim 12, wherein the optical integrated circuit is configured inaccordance with silicon on insulator technology, the method furthercomprising: forming at least one trench that extends along the nanotaperportion and into at least a portion of a buried oxide layer of theoptical integrated circuit.
 15. A method comprising: affixing an opticalfiber in a channel formed in a slab to form an integrated structure, theoptical fiber comprising a core portion and a cladding portion; removinga first portion of the integrated structure from a second portion of theintegrated structure at a predetermined angle defined relative to alongitudinal axis of the fiber optic structure, wherein the secondportion has an outer surface portion that is beveled at thepredetermined angle after removing the first portion from the secondportion, and wherein the beveled outer surface portion comprises boththe core portion and the cladding portion; affixing the beveled outersurface portion to a top surface of a top layer of an optical integratedcircuit, the top layer comprising a waveguide core that forms an opticalwaveguide path of the optical integrated circuit; forming a pair oftrenches in the top layer, each of the pair of trenches extending alonga side of at least a portion of the waveguide core; and adding anadhesive material in each of the pair of trenches, wherein the beveledouter surface portion is affixed to the adhesive material in thetrenches.
 16. The method of claim 15, wherein the top layer furthercomprises a waveguide cladding surrounding the waveguide core, andwherein forming the pair of trenches comprises forming the pair oftrenches in the waveguide cladding.
 17. The method of claim 15, whereinthe channel has a substantially uniform depth in the slab from a firstend to a second end of the slab.
 18. The method of claim 15, wherein theslab comprises a glass material, and wherein the channel is formedthrough a cutting process.
 19. The method of claim 15, wherein the slabcomprises silicon, and wherein the channel is formed through at leastone of lithography or an etching process.
 20. The method of claim 15,further comprising: aligning the core portion of the beveled outersurface with a nanotaper of the waveguide core before affixing thebeveled outer surface to the top surface.